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REVIEW

Nanolithography techniques in the advancement of drug delivery systems: A comprehensive review

Shreya S. Ingle1 Pranav Sonawane2 Dinesh R. Bhoi1 Mansi Bandawane3 Meghraj V. Suryawanshi1*
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1 Department of Pharmaceutics, Faculty of Pharmacy, Sandip Institute of Pharmaceutical Sciences, Nashik, Maharashtra, India
2 Department of Pharmaceutics, Faculty of Pharmacy, SND College of Pharmacy, Nashik, Maharashtra, India
3 Department of Pharmaceutics, Faculty of Pharmacy, Matoshri College of Pharmacy, Nashik, Maharashtra, India
Submitted: 14 September 2025 | Revised: 13 January 2026 | Accepted: 16 March 2026 | Published: 10 June 2026
© 2026 by the Author(s). Licensee Biomaterials Translational, USA. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution-NonCommercial-ShareAlike 4.0 (CC BY-NC-SA 4.0) (https://creativecommons.org/licenses/by-nc-sa/4.0/deed.en)
Abstract

Nanolithography is a cutting-edge nanoscale patterning technology that plays a pivotal role in the development of next-generation drug delivery systems and biomedical devices. This review comprehensively explores major nanolithographic techniques, such as photolithography, electron beam lithography, nanoimprint lithography, dip-pen nanolithography, and others, highlighting their working principles, resolution capabilities, fabrication strategies, and specific applications in pharmaceutical research. These techniques enable the fabrication of precise nanostructures, including microneedles, biosensors, implantable devices, and lab-on-a-chip platforms for targeted, controlled drug release. Nanolithography can improve targeted delivery and controlled-release kinetics by creating stimuli-responsive reservoirs and precisely patterning ligands on the surface. These developments offer a scalable approach to customized therapies and improved treatments for systemic and chronic illnesses by integrating semiconductor manufacturing with nanomedicine. The clinical relevance of each method is discussed in light of its ability to enhance drug bioavailability, reduce systemic side effects, and support personalized therapy. In addition, the review addresses current limitations, such as scalability, cost, and technical complexity, alongside emerging solutions and innovations. Future drug delivery systems may benefit from ongoing developments in nanolithographic methods, which could enhance therapeutic efficacy and safety. The development of nanolithography has the potential to create customized therapeutic and diagnostic solutions for emerging healthcare concerns, offering revolutionary promise in precision medicine. 

Keywords
Nanolithography
Photolithography
Electron beam lithography
X-ray lithography
Extreme ultraviolet lithography
Funding
None.
Conflict of interest
The authors declare that they have no conflicts of interest regarding this publication.
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